Publications

/7/:  Bischoff, J.: " Formulation of the normal vector RCWA for symmetric crossed gratings in symmetric mountings ", J. Opt. Soc. Am. A 27 (2010), pp. 1024-1031

/6/:  Bischoff, J.: " Fast diffraction computation schema for multilayer crossed gratings containing layers with 1D periodicity ", J. Opt. Soc. Am. A 27 (2010), pp. 116-122

/5/:  Bischoff, J.: "Improved Diffraction Computation with a Hybrid C-RCWA-Method ", Proc. on SPIE Vol. 7272 (2009)

/4/:  Bischoff, J.: "Prospects and Limits of the Rayleigh Fourier Approach for Diffraction Modelling in Scatterometry  and Lithography", Proc. on SPIE 7390 (2009)

/3/: Bischoff, J., Niu, X. and Jakatdar, N.: "Optical Digital Profilometry Applications on Contact Holes", Proc. on SPIE 5038 (2003)

/2/: Bischoff, J.,Brunner, R., Bauer, A. and Haak, U.: "Light Diffraction Based Overlay Measurement", Proc. on SPIE 4344 (2001)

/1/: Bischoff, J. and Brunner, R.: "Numerical Investigation of the Resolution in Solid Immersion Lens Systems", Proc. on SPIE 4099 (2000)