OSIRES
Optical Engineering and Software
http://www.osires.biz/

Publications

/14:  Granet, G. and Bischoff, J.: " Matched coordinates for the analysis of 1D gratings ", J. Opt. Soc. Am. A 38 (2021), pp. 790-798

/13/:  Bischoff, J, Mastylo, R, and Manske, E.: " Scanning wave front detection coherent Fourier scatterometry (SCFS) ", Proc. on SPIE Vol. 11352-42 (2020)

/12/:  Bischoff, J , Pahl, T, Lehmann, P and Manske, E: " Model Based Dimensional Optical Metrology ", Proc. on SPIE Vol. 11352-27 (2020)

/11/:  Bischoff, J, and Hehl, K.: " Scatterometry modeling for gratings with roughness and irregularities ", Proc. on SPIE Vol. 9778 (2016)

/10/:  Bischoff, J, Manske, E. and Baitinger, H.: " Modeling of profilometry with laser focus sensors ", Proc. on SPIE Vol. 8083 (2011)

/9/:  Bischoff, J. and Neundorf, W.: " Effective schema for the rigorous modeling of grating diffraction with focused beams ", Appl. Opt. 50 (2011), pp. 2474-2483

/8/:  Bischoff, J. and Hehl, K.: " Perturbation approach applied to modal diffraction methods", J. Opt. Soc. Am. A 28 (2011), pp. 859-867

/7/:  Bischoff, J.: " Formulation of the normal vector RCWA for symmetric crossed gratings in symmetric mountings ", J. Opt. Soc. Am. A 27 (2010), pp. 1024-1031

/6/:  Bischoff, J.: " Fast diffraction computation schema for multilayer crossed gratings containing layers with 1D periodicity ", J. Opt. Soc. Am. A 27 (2010), pp. 116-122

/5/:  Bischoff, J.: "Improved Diffraction Computation with a Hybrid C-RCWA-Method ", Proc. on SPIE Vol. 7272 (2009)

/4/:  Bischoff, J.: "Prospects and Limits of the Rayleigh Fourier Approach for Diffraction Modelling in Scatterometry  and Lithography", Proc. on SPIE 7390 (2009)

/3/: Bischoff, J., Niu, X. and Jakatdar, N.: "Optical Digital Profilometry Applications on Contact Holes", Proc. on SPIE 5038 (2003)

/2/: Bischoff, J.,Brunner, R., Bauer, A. and Haak, U.: "Light Diffraction Based Overlay Measurement", Proc. on SPIE 4344 (2001)

/1/: Bischoff, J. and Brunner, R.: "Numerical Investigation of the Resolution in Solid Immersion Lens Systems", Proc. on SPIE 4099 (2000)

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